Chip-equipment provider Axcelis Technologies Inc. has rolled out a new tool that claims to enable "molecular implantation."
An extension of the company's new Optima HD platform, the Optima HD Imax is an ion implanter designed for use in the production of logic and memory devices.
It is said to implant clusters of boron, instead of individual atoms. The first Imax-enabled Optima HD tools will begin shipping by the end of the year.
"Molecular implantation is an enabling technology in the sub-65-nm device era. It allows customers to achieve productivity goals faster,
making certain applications — like dual poly gates — economically viable for the first time," said Mary Puma, chairman and CEO of Axcelis (Beverly, Mass.), in a statement.
The Optima HD Imax implants molecules of B18H22, including 18 boron atoms, resulting in higher productivity than users could achieve with traditional approaches, without the risk of energy contamination associated with beam deceleration, according to the company.
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